Introduction
Product Name: RCA Cleaning Equipment
Function: Used for the removal of LPCVD/PECVD deposited polysilicon
Process Flow: Deposition removal→Post-cleaning→Pickling→Post-cleaning
Features: Supports MES, RFID, and optional online weighing functions; one-key online washing and solution replacement for simple and quick fluid exchange; process tank circulation volume adjustable according to process requirements; compatible with additives from various brands; thorough removal of deposition and thorough cleaning.